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Sub-micron feedback stage system - List of Manufacturers, Suppliers, Companies and Products

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Submicron feedback stage system (precision positioning device)

Positioning with sub-micron resolution! Excellent reproducibility with built-in encoder, stage with a stroke of 20 to 400 mm.

■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with sub-micron resolution, and the optical linear encoder integrated into the stage reads the position and performs feedback control, resulting in high resolution and excellent reproducibility. The stage controller operates at a resolution of either 100nm (0.1μm) or 50nm (0.05μm). ■Long Stroke It can move up to a maximum of 400mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lift types and micro-rotation options. For more details, please download the catalog or contact us.

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Vacuum-Compatible Submicron Feedback Stage System

For positioning applications within a vacuum chamber, positioning with sub-micron resolution, maximum movement range of 100mm.

A precision positioning device (feedback stage system) has achieved reproducibility with sub-micron resolution (0.1μm or 0.05μm) using an optical linear encoder built into the stage. It can be used within a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is widely used due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing issues with positioning, please feel free to contact us. For more details, please download the catalog or contact us.

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